SAGE Reference - Encyclopedia of Nanoscience and Society

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Emerging Nanopatterning Methods

In: Encyclopedia of Nanoscience and Society
Edited by: David H. Guston
Subject:Public Policy (general), Science, Technology & Society

Highly integrated nanostructured devices call for advanced technical approaches to lithographic methods, which are capable of higher resolution and feature cheaper manufacturing costs than state-of-the-art optical lithography. Such approaches comprise, for example, ...

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  Guston, D. H. (2010). Emerging nanopatterning methods. In Encyclopedia of nanoscience and society (Vol. 1, pp. 184-185). SAGE Publications, Inc., https://dx.doi.org/10.4135/9781412972093.n101
  
  Guston, David H. "Emerging Nanopatterning Methods." In Encyclopedia of Nanoscience and Society, edited by Guston, David H., 184-85. Thousand Oaks, CA: SAGE Publications, Inc., 2010. https://dx.doi.org/10.4135/9781412972093.n101.
  
  Guston, D. H. 2010. Emerging Nanopatterning Methods. In: David H. Guston Editor, 2010. Encyclopedia of Nanoscience and Society, Thousand Oaks, CA: SAGE Publications, Inc. pp. 184-185 Available at: <https://dx.doi.org/10.4135/9781412972093.n101> [Accessed 14 Aug 2022].
  
  Guston, David H. "Emerging Nanopatterning Methods." Encyclopedia of Nanoscience and Society. Edited by Vol. 1. Thousand Oaks: SAGE Publications, Inc., 2010, pp. 184-85. SAGE Knowledge. 14 Aug 2022, doi: https://dx.doi.org/10.4135/9781412972093.n101.
  
  Guston, David H. (2010). Emerging nanopatterning methods In:Emerging nanopatterning methods Encyclopedia of nanoscience and society Vol. 1. Thousand Oaks, CA: SAGE Publications, Inc.; 2010:184-185. doi:10.4135/9781412972093.n101
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